WebbOperating Safety Laser: The FLX-2320-S contains two 4 mW solid-state lasers with wavelengths of 670 nm and 780 nm. A shutter automatically blocks the laser beam when … Webbsubstrate and causes the wafer edges to bow downwards). The Toho FLX-2320S, thin film stress measurement instrument determines the stress on the substrate by comparing …

Toho Technology FLX-2320-R - used-line.com

WebbTo be refurbished *.Measurement -Wafer: 8" -Speed: 5 sec. for 150mm wafer. -Range: 2x10E7 ~ 4x10E7 dyne/cm2 -RMS Noise: 0.0001 mE-1(radius=10,000 meters) … WebbThe Toho FLX-2320S, thin film stress measurement instrument determines the stress on the substrate by comparing the curvature before ... The film thickness is also required for operating the FLX-2320. Suggested tools are the ellipsometer and Filmetrics in the cleanroom. b) Go to the ‘Progress Program’. buy landcruiser

FLX2320-R Automated Stress Measurement System

WebbThe FLX-2320-S determines stress by measuring the curvature change of pre- and post-film deposition. The stress calculation is based on Stoney’s equation, which relates the biaxial modulus of the substrate, thickness of the film and the substrate, and the curvature change. The stress measurements can be made from -65°C to 500°C at a heating ... WebbToho FLX-2320-R Thin Film Stress Measurement Systems offer industry standard capabilities for mass production and research facilities that demand accurate stress measurements on various films and substrates up to 200mm in diameter. Incorporating KLA-Tencor’s patented “Dual Wavelength” technology, Toho FLX Series WebbToho Technology Inc. 4809 N Ravenswood Ave, Suite 113 Chicago, Illinois 60640 Tel: 773.583.7183 www.tohotechnology.com FLX stress measure-ment systems use the … buy land down south